Atomization

/ˌætəmaɪˈzeɪʃən/ noun

The process of breaking something into very tiny, separate pieces or particles, often creating a fine mist or spray.

From atomize (to break into atoms) + -ation (noun suffix). Atomize comes from atom (Greek atomos, meaning indivisible) + -ize (to make or become). The term evolved from chemistry to describe any process of fragmentation.

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